Granted Patent
Utility
US 6,607,925 · App. 10/165,837
Hard mask removal process including isolation dielectric refill
Inventors:
Unsoon Kim, Dawn Hopper, Yider Wu, Krishnashree Achuthan
Patented Case
View Patent ↗
Granted: Aug 19, 2003
Filed: Jun 6, 2002
Inventors
Unsoon Kim
Dawn Hopper
Yider Wu
Krishnashree Achuthan
Assignee (at issue)
Advanced Micro Devices, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.