IP Library › Granted Patent US 6,607,966
Granted Patent Utility
US 6,607,966 · App. 10/039,022

Selective method to form roughened silicon

Inventors: Thomas A. Figura, Zhiqiang Wu, Li Li
Patented Case View Patent ↗
Granted: Aug 19, 2003 Filed: Jan 2, 2002
Inventors
Thomas A. Figura
Zhiqiang Wu
Li Li
Assignee (at issue)
Micron Technology, Inc.

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Quick Facts
Patent No.
US 6,607,966
App. No.
10/039,022
Filed
2002-01-02
Granted
2003-08-19
Kind
B2