Granted Patent
Utility
US 6,607,984 · App. 09/597,122
Removable inorganic anti-reflection coating process
Inventors:
Gill Yong Lee, Scott D. Halle, Jochen Beintner
Patented Case
View Patent ↗
Granted: Aug 19, 2003
Filed: Jun 20, 2000
Inventors
Gill Yong Lee
Scott D. Halle
Jochen Beintner
Assignees (at issue)
International Business Machines Corporation
Infineon Technologies AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.