Granted Patent
Utility
US 6,607,988 · App. 09/749,554
Manufacturing method of semiconductor integrated circuit device
Inventors:
Takashi Yunogami, Yoshitaka Nakamura, Kazuo Nojiri, Sukeyoshi Tsunekawa, Toshiyuki Arai, Miwako Nakahara, Shigeru Ohno, Tomonori Saeki, Masaru Izawa
Patented Case
View Patent ↗
Granted: Aug 19, 2003
Filed: Dec 28, 2000
Inventors
Takashi Yunogami
Yoshitaka Nakamura
Kazuo Nojiri
Sukeyoshi Tsunekawa
Toshiyuki Arai
Miwako Nakahara
Shigeru Ohno
Tomonori Saeki
Masaru Izawa
Assignee (at issue)
HITACHI, LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.