Granted Patent
Utility
US 6,607,991 · App. 09/474,399
Method for curing spin-on dielectric films utilizing electron beam radiation
Inventors:
William R. Livesay, Matthew Ross, Anthony L. Rubiales, Heike Thompson, Selmer Wong, Trey Marlowe, Mark Narcy
Patented Case
View Patent ↗
Granted: Aug 19, 2003
Filed: Dec 29, 1999
Inventors
William R. Livesay
Matthew Ross
Anthony L. Rubiales
Heike Thompson
Selmer Wong
Trey Marlowe
Mark Narcy
Assignee (at issue)
Electron Vision Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.