Granted Patent
Utility
US 6,608,359 · App. 10/230,491
Semiconductor device incorporating hemispherical solid immersion lens, apparatus and method for manufacturing the same
Inventor:
Hideki Kitahata
Patented Case
View Patent ↗
Granted: Aug 19, 2003
Filed: Aug 29, 2002
Inventor
Hideki Kitahata
Assignee (at issue)
NEC Electronics Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.