IP Library Granted Patent US 6,608,690
Granted Patent Utility
US 6,608,690 · App. 10/007,124

Optical profilometry of additional-material deviations in a periodic grating

Inventors: Xinhui Niu, Nickhil Jakatdar
Patented Case View Patent ↗
Granted: Aug 19, 2003 Filed: Dec 4, 2001
Inventors
Xinhui Niu
Nickhil Jakatdar
Assignee (at issue)
TIMBRE TECHNOLOGIES, INC.

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Quick Facts
Patent No.
US 6,608,690
App. No.
10/007,124
Filed
2001-12-04
Granted
2003-08-19
Kind
B2