Granted Patent
Utility
US 6,609,086 · App. 10/075,904
Profile refinement for integrated circuit metrology
Inventors:
Junwei Bao, Srinivas Doddi, Nickhil Jakatdar, Vi Vuong
Patented Case
View Patent ↗
Granted: Aug 19, 2003
Filed: Feb 12, 2002
Inventors
Junwei Bao
Srinivas Doddi
Nickhil Jakatdar
Vi Vuong
Assignee (at issue)
TIMBRE TECHNOLOGIES, INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.