Granted Patent
Utility
US 6,609,869 · App. 09/754,571
Transfer chamber with integral loadlock and staging station
Inventors:
Ravinder Aggarwal, James Kusbel
Patented Case
View Patent ↗
Granted: Aug 26, 2003
Filed: Jan 4, 2001
Inventors
Ravinder Aggarwal
James Kusbel
Assignee (at issue)
ASM America, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.