Granted Patent
Utility
US 6,609,876 · App. 10/012,142
Loading and unloading station for semiconductor processing installations
Inventors:
Andreas Mages, Werner Scheler, Herbert Blaschitz, Alfred Schulz, Heinz Schneider
Patented Case
View Patent ↗
Granted: Aug 26, 2003
Filed: Nov 13, 2001
Inventors
Andreas Mages
Werner Scheler
Herbert Blaschitz
Alfred Schulz
Heinz Schneider
Assignee (at issue)
Brooks Automation GmbH
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.