Granted Patent
Utility
US 6,609,877 · App. 09/679,498
Vacuum chamber load lock structure and article transport mechanism
Inventor:
Bruce Ramsay
Patented Case
View Patent ↗
Granted: Aug 26, 2003
Filed: Oct 4, 2000
Inventor
Bruce Ramsay
Assignee (at issue)
The BOC Group Limited
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.