Granted Patent
Utility
US 6,609,947 · App. 09/651,240
Planarizing machines and control systems for mechanical and/or chemical-mechanical planarization of micro electronic substrates
Inventor:
Scott E. Moore
Patented Case
View Patent ↗
Granted: Aug 26, 2003
Filed: Aug 30, 2000
Inventor
Scott E. Moore
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.