Granted Patent
Utility
US 6,612,902 · App. 09/823,198
Method and apparatus for end point triggering with integrated steering
Inventors:
John M. Boyd, Herbert E. Litvak
Patented Case
View Patent ↗
Granted: Sep 2, 2003
Filed: Mar 29, 2001
Inventors
John M. Boyd
Herbert E. Litvak
Assignee (at issue)
Lam Research Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.