Granted Patent
Utility
US 6,612,911 · App. 10/044,174
Alkali metal-containing polishing system and method
Inventors:
Phillip W. Carter, Gregory Bogush, Francesco M. De Rege, Jeffrey P. Chamberlain, David Schroeder, Brian L. Mueller
Patented Case
View Patent ↗
Granted: Sep 2, 2003
Filed: Jan 11, 2002
Inventors
Phillip W. Carter
Gregory Bogush
Francesco M. De Rege
Jeffrey P. Chamberlain
David Schroeder
Brian L. Mueller
Assignee (at issue)
Cabot Microelectronics Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.