Granted Patent
Utility
US 6,616,331 · App. 09/984,914
Method for predicting temperature and test wafer for use in temperature prediction
Inventors:
Satoshi Shibata, Yuko Nambu
Patented Case
View Patent ↗
Granted: Sep 9, 2003
Filed: Oct 31, 2001
Inventors
Satoshi Shibata
Yuko Nambu
Assignee (at issue)
SUMITOMO ELECTRIC INDUSTRIES, LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.