Granted Patent
Utility
US 6,617,213 · App. 10/057,065
Method for achieving high self-aligning vertical gate studs relative to the support isolation level
Inventor:
Klaus Hummler
Patented Case
View Patent ↗
Granted: Sep 9, 2003
Filed: Jan 25, 2002
Inventor
Klaus Hummler
Assignee (at issue)
Infineon Technologies AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.