Granted Patent
Utility
US 6,617,261 · App. 10/017,599
Structure and method for fabricating GaN substrates from trench patterned GaN layers on sapphire substrates
Inventors:
William S. Wong, David K. Biegelsen, Michael A. Kneissl
Patented Case
View Patent ↗
Granted: Sep 9, 2003
Filed: Dec 18, 2001
Inventors
William S. Wong
David K. Biegelsen
Michael A. Kneissl
Assignee (at issue)
Xerox Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.