Granted Patent
Utility
US 6,618,421 · App. 09/837,035
High repetition rate gas discharge laser with precise pulse timing control
Inventors:
Palash P. Das, Jennan Yu, Stuart L. Anderson, Helmut Schillinger, Tobias Pflanz, Claus Strowitzki, Claudia Hartmann, Stephan Geiger, Brett D. Smith, William N. Partlo
Patented Case
View Patent ↗
Granted: Sep 9, 2003
Filed: Apr 18, 2001
Inventors
Palash P. Das
Jennan Yu
Stuart L. Anderson
Helmut Schillinger
Tobias Pflanz
Claus Strowitzki
Claudia Hartmann
Stephan Geiger
Brett D. Smith
William N. Partlo
Assignee (at issue)
Cymer, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.