Granted Patent
Utility
US 6,619,901 · App. 09/857,366
Method and apparatus for air guidance in a processing chamber
Inventors:
Berthold Duethorn, Thomas Hertfelder, Eberhard Jost, Lothar Gail
Patented Case
View Patent ↗
Granted: Sep 16, 2003
Filed: Jan 23, 2002
Inventors
Berthold Duethorn
Thomas Hertfelder
Eberhard Jost
Lothar Gail
Assignee (at issue)
Robert Bosch GmbH
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.