IP Library › Granted Patent US 6,621,082
Granted Patent Utility
US 6,621,082 · App. 10/171,797

Automatic focusing system for scanning electron microscope equipped with laser defect detection function

Inventors: Seiji Morita, Mitsuyoshi Sato, Atsushi Uemoto
Patented Case View Patent ↗
Granted: Sep 16, 2003 Filed: Jun 13, 2002
Inventors
Seiji Morita
Mitsuyoshi Sato
Atsushi Uemoto
Assignee (at issue)
SEIKO INSTRUMENTS INC.

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Quick Facts
Patent No.
US 6,621,082
App. No.
10/171,797
Filed
2002-06-13
Granted
2003-09-16
Kind
B2