IP Library › Granted Patent US 6,623,331
Granted Patent Utility
US 6,623,331 · App. 09/788,082

Polishing disk with end-point detection port

Inventors: Roland Sevilla, James A. Hicks, Jeremy Jones
Patented Case View Patent ↗
Granted: Sep 23, 2003 Filed: Feb 16, 2001
Inventors
Roland Sevilla
James A. Hicks
Jeremy Jones
Assignee (at issue)
Cabot Microelectronics Corporation

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Quick Facts
Patent No.
US 6,623,331
App. No.
09/788,082
Filed
2001-02-16
Granted
2003-09-23
Kind
B2