Granted Patent
Utility
US 6,624,003 · App. 10/068,259
Integrated MEMS device and package
Inventor:
Janet L. Rice
Patented Case
View Patent ↗
Granted: Sep 23, 2003
Filed: Feb 6, 2002
Inventor
Janet L. Rice
Assignee (at issue)
Teravicta Technologies, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.