Granted Patent
Utility
US 6,624,583 · App. 10/185,627
Method and apparatus for plasma treating a chemical species
Inventors:
Bernard F. Coll, Paul Vonallmen, Frederic Zenhausern
Patented Case
View Patent ↗
Granted: Sep 23, 2003
Filed: Jun 28, 2002
Inventors
Bernard F. Coll
Paul Vonallmen
Frederic Zenhausern
Assignee (at issue)
Motorola, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.