Granted Patent
Utility
US 6,624,893 · App. 09/875,638
Correction of scanning errors in interferometric profiling
Inventors:
Joanna Schmit, Artur Olszak
Patented Case
View Patent ↗
Granted: Sep 23, 2003
Filed: Jun 6, 2001
Inventors
Joanna Schmit
Artur Olszak
Assignee (at issue)
Veeco Instruments Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.