Granted Patent
Utility
US 6,624,894 · App. 09/888,826
Scanning interferometry with reference signal
Inventors:
Artur Olszak, Joanna Schmit
Patented Case
View Patent ↗
Granted: Sep 23, 2003
Filed: Jun 25, 2001
Inventors
Artur Olszak
Joanna Schmit
Assignee (at issue)
Veeco Instruments Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.