Granted Patent
Utility
US 6,624,921 · App. 09/804,805
Micromirror device package fabrication method
Inventors:
Thomas P. Glenn, Steven Webster, Roy Dale Hollaway
Patented Case
View Patent ↗
Granted: Sep 23, 2003
Filed: Mar 12, 2001
Inventors
Thomas P. Glenn
Steven Webster
Roy Dale Hollaway
Assignee (at issue)
Amkor Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.