Granted Patent
Utility
US 6,628,039 · App. 09/891,700
Microelectromechanical device having single crystalline components and metallic components
Inventor:
Vijayakumar R. Dhuler
Patented Case
View Patent ↗
Granted: Sep 30, 2003
Filed: Jun 26, 2001
Inventor
Vijayakumar R. Dhuler
Assignee (at issue)
Memscap S.A.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.