Granted Patent
Utility
US 6,630,201 · App. 09/999,636
Adsorption process for atomic layer deposition
Inventors:
Tony P. Chiang, Karl Leeser, Jeffrey A. Brown, Jason Babcoke
Patented Case
View Patent ↗
Granted: Oct 7, 2003
Filed: Oct 24, 2001
Inventors
Tony P. Chiang
Karl Leeser
Jeffrey A. Brown
Jason Babcoke
Assignee (at issue)
Angstron Systems, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.