IP Library Granted Patent US 6,632,115
Granted Patent Utility
US 6,632,115 · App. 09/857,654

Method for forming transparent conductive film using chemically amplified resist

Inventors: Takatoshi Tsujimura, Takashi Miyamoto
Patented Case View Patent ↗
Granted: Oct 14, 2003 Filed: Aug 17, 2001
Inventors
Takatoshi Tsujimura
Takashi Miyamoto
Assignee (at issue)
International Business Machines Corporation

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Quick Facts
Patent No.
US 6,632,115
App. No.
09/857,654
Filed
2001-08-17
Granted
2003-10-14
Kind
B1