Granted Patent
Utility
US 6,633,366 · App. 09/925,723
Lithographic apparatus, device manufacturing method, and device manufactured thereby
Inventors:
Pieter Willem Herman De Jager, Pieter Kruit, Arno Jan Bleeker, Karel Diederick Van Der Mast
Patented Case
View Patent ↗
Granted: Oct 14, 2003
Filed: Aug 10, 2001
Inventors
Pieter Willem Herman De Jager
Pieter Kruit
Arno Jan Bleeker
Karel Diederick Van Der Mast
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.