Granted Patent
Utility
US 6,635,541 · App. 09/659,102
Method for annealing using partial absorber layer exposed to radiant energy and article made with partial absorber layer
Inventors:
Somit Talwar, Yun Wang, Carol M. Gelatos
Patented Case
View Patent ↗
Granted: Oct 21, 2003
Filed: Sep 11, 2000
Inventors
Somit Talwar
Yun Wang
Carol M. Gelatos
Assignee (at issue)
Ultratech Stepper, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.