Granted Patent
Utility
US 6,635,564 · App. 09/662,424
Semiconductor structure and method of fabrication including forming aluminum columns
Inventors:
Stefan Weber, Roy Iggulden
Patented Case
View Patent ↗
Granted: Oct 21, 2003
Filed: Sep 14, 2000
Inventors
Stefan Weber
Roy Iggulden
Assignees (at issue)
Infineon Technologies AG
International Business Machines Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.