Granted Patent
Utility
US 6,635,567 · App. 09/758,997
Method of producing alignment marks
Inventors:
Eva Ebertseder, Matthias Lehr, Torsten Werneke, Jochen Hanebeck, Jürgen Pahlitzsch
Patented Case
View Patent ↗
Granted: Oct 21, 2003
Filed: Jan 11, 2001
Inventors
Eva Ebertseder
Matthias Lehr
Torsten Werneke
Jochen Hanebeck
Jürgen Pahlitzsch
Assignee (at issue)
Infineon Technologies AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.