Granted Patent
Utility
US 6,635,883 · App. 09/727,810
Gas cluster ion beam low mass ion filter
Inventors:
Richard Torti, Jerald P. Dykstra
Patented Case
View Patent ↗
Granted: Oct 21, 2003
Filed: Dec 1, 2000
Inventors
Richard Torti
Jerald P. Dykstra
Assignee (at issue)
Epion Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.