Granted Patent
Utility
US 6,638,366 · App. 09/855,962
Automated spray cleaning apparatus for semiconductor wafers
Inventors:
Michael D. Lammert, Victor J. Watson, John M. DiMond, Michael E. Barsky
Patented Case
View Patent ↗
Granted: Oct 28, 2003
Filed: May 15, 2001
Inventors
Michael D. Lammert
Victor J. Watson
John M. DiMond
Michael E. Barsky
Assignee (at issue)
NORTHROP GRUMMAN CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.