Granted Patent
Utility
US 6,641,273 · App. 10/186,566
MEMS structure with mechanical overdeflection limiter
Inventors:
Bryan P. Staker, James Spallas, Lawrence P. Muray, Andres Fernandez
Patented Case
View Patent ↗
Granted: Nov 4, 2003
Filed: Jun 28, 2002
Inventors
Bryan P. Staker
James Spallas
Lawrence P. Muray
Andres Fernandez
Assignee (at issue)
Glimmerglass Networks, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.