Granted Patent
Utility
US 6,642,147 · App. 09/938,097
Method of making thermally stable planarizing films
Inventors:
Omer H. Dokumaci, Bruce B. Doris, Michael P. Belyansky
Patented Case
View Patent ↗
Granted: Nov 4, 2003
Filed: Aug 23, 2001
Inventors
Omer H. Dokumaci
Bruce B. Doris
Michael P. Belyansky
Assignee (at issue)
International Business Machines Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.