Granted Patent
Utility
US 6,642,149 · App. 10/286,789
Plasma processing method
Inventors:
Tomoki Suemasa, Tsuyoshi Ono, Kouichiro Inazawa, Makoto Sekine, Itsuko Sakai, Yukimasa Yoshida
Patented Case
View Patent ↗
Granted: Nov 4, 2003
Filed: Nov 4, 2002
Inventors
Tomoki Suemasa
Tsuyoshi Ono
Kouichiro Inazawa
Makoto Sekine
Itsuko Sakai
Yukimasa Yoshida
Assignees (at issue)
Tokyo Electron Limited
Kabushiki Kaisha Toshiba
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.