Granted Patent
Utility
US 6,642,995 · App. 09/986,006
Mask-to-wafer alignment system
Inventors:
William C. Sweatt, Daniel A. Tichenor, Steven J. Haney
Patented Case
View Patent ↗
Granted: Nov 4, 2003
Filed: Nov 7, 2001
Inventors
William C. Sweatt
Daniel A. Tichenor
Steven J. Haney
Assignee (at issue)
EUV LLC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.