Granted Patent
Utility
US 6,643,017 · App. 10/184,953
Method and system for controlling the photolithography process
Inventors:
Yoel Cohen, Moshe Finarov
Patented Case
View Patent ↗
Granted: Nov 4, 2003
Filed: Jul 1, 2002
Inventors
Yoel Cohen
Moshe Finarov
Assignee (at issue)
NOVA MEASURING INSTRUMENTS INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.