IP Library Granted Patent US 6,643,353
Granted Patent Utility
US 6,643,353 · App. 10/043,817

Protective layer for multilayers exposed to x-rays

Inventors: Boris Verman, Karsten Joensen, Yuriy Platonov, Srivatsan Seshardi
Patented Case View Patent ↗
Granted: Nov 4, 2003 Filed: Jan 10, 2002
Inventors
Boris Verman
Karsten Joensen
Yuriy Platonov
Srivatsan Seshardi
Assignee (at issue)
Osmic, Inc.

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Quick Facts
Patent No.
US 6,643,353
App. No.
10/043,817
Filed
2002-01-10
Granted
2003-11-04
Kind
B2