Granted Patent
Utility
US 6,645,682 · App. 10/169,033
Thinner for rinsing photoresist and method of treating photoresist layer
Inventors:
Hong-Sick Park, Jin-Ho Ju, Yu-Kyung Lee, Sung-Chul Kang, Sae-Tae Oh, Doek-Man Kang
Patented Case
View Patent ↗
Granted: Nov 11, 2003
Filed: Jun 25, 2002
Inventors
Hong-Sick Park
Jin-Ho Ju
Yu-Kyung Lee
Sung-Chul Kang
Sae-Tae Oh
Doek-Man Kang
Assignee (at issue)
SAMSUNG DISPLAY CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.