IP Library Granted Patent US 6,645,694
Granted Patent Utility
US 6,645,694 · App. 09/922,638

Pattern formation material and pattern formation method

Inventors: Shinji Kishimura, Masayuki Endo, Masaru Sasago, Masamitsu Shirai, Masahiro Tsunooka
Patented Case View Patent ↗
Granted: Nov 11, 2003 Filed: Aug 7, 2001
Inventors
Shinji Kishimura
Masayuki Endo
Masaru Sasago
Masamitsu Shirai
Masahiro Tsunooka
Assignee (at issue)
SUMITOMO ELECTRIC INDUSTRIES, LTD.

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Quick Facts
Patent No.
US 6,645,694
App. No.
09/922,638
Filed
2001-08-07
Granted
2003-11-11
Kind
B2