Granted Patent
Utility
US 6,646,261 · App. 10/024,777
SEM provided with a secondary electron detector having a central electrode
Inventor:
Jan Martijn Krans
Patented Case
View Patent ↗
Granted: Nov 11, 2003
Filed: Dec 20, 2001
Inventor
Jan Martijn Krans
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.