IP Library Granted Patent US 6,646,263
Granted Patent Utility
US 6,646,263 · App. 10/123,666

Method of X-ray analysis in a particle-optical apparatus

Inventors: Laurens Franz Taemsz Kwakman, Kars Z. Troost
Patented Case View Patent ↗
Granted: Nov 11, 2003 Filed: Apr 16, 2002
Inventors
Laurens Franz Taemsz Kwakman
Kars Z. Troost
Assignee (at issue)
FEI Company

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Quick Facts
Patent No.
US 6,646,263
App. No.
10/123,666
Filed
2002-04-16
Granted
2003-11-11
Kind
B2