Granted Patent
Utility
US 6,646,533 · App. 10/152,360
Photolithographically-patterned out-of-plane coil structures and method of making
Inventors:
David K. Biegelson, Christopher L. Chua, David K. Fork
Patented Case
View Patent ↗
Granted: Nov 11, 2003
Filed: May 20, 2002
Inventors
David K. Biegelson
Christopher L. Chua
David K. Fork
Assignee (at issue)
Xerox Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.