Granted Patent
Utility
US 6,648,743 · App. 09/946,253
Chemical mechanical polishing pad
Inventor:
Peter A. Burke
Patented Case
View Patent ↗
Granted: Nov 18, 2003
Filed: Sep 5, 2001
Inventor
Peter A. Burke
Assignee (at issue)
LSI Logic Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.