Granted Patent
Utility
US 6,648,982 · App. 09/879,412
Steam cleaning system and method for semiconductor process equipment
Inventors:
David S. Zuck, Kurtis R. Macura
Patented Case
View Patent ↗
Granted: Nov 18, 2003
Filed: Jun 11, 2001
Inventors
David S. Zuck
Kurtis R. Macura
Assignee (at issue)
Quantum Global Technologies LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.