Granted Patent
Utility
US 6,649,439 · App. 10/210,799
Semiconductor-air gap grating fabrication using a sacrificial layer process
Inventors:
Michael P. Nesnidal, David Forbes
Patented Case
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Granted: Nov 18, 2003
Filed: Aug 1, 2002
Inventors
Michael P. Nesnidal
David Forbes
Assignee (at issue)
NORTHROP GRUMMAN CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.