Granted Patent
Utility
US 6,649,487 · App. 10/046,813
Method of manufacturing semiconductor integrated circuit device
Inventors:
Takashi Hashimoto, Yoshifumi Ohnishi, Toshiyuki Kikuchi
Patented Case
View Patent ↗
Granted: Nov 18, 2003
Filed: Jan 17, 2002
Inventors
Takashi Hashimoto
Yoshifumi Ohnishi
Toshiyuki Kikuchi
Assignee (at issue)
HITACHI, LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.